Suitable for 7th generation glass substrates

• Loading capability of 80 kg/280 Nm/40 kgm2 suitable
• for 2200 x 2000 substrates (LCD)
• 3670 mm long stroke for horizontal movement

Fastest swivel axis and quickest back and forth axis in its class

• Production lines for 7th generation glass substrates can realize, short cycle times nearly equal to 5th generarion glass substrate lines

Unique linkage structure applied to up and down axis

• High-rigidity structure for minimizing flexure and vibration
• Belt-less structure ensures high reliability and safety

Moving cables are completely enclosed in the arm

• The enclosed design prevents particle generation and looks good too

Wide range of models in product series

• Double-arm (min. pass line height of 1125 mm)
• Single-arm (min. pass line height of 1065 mm)
• Up and down stroke: 2.4 m and 1.8 m